JPS6114649Y2 - - Google Patents

Info

Publication number
JPS6114649Y2
JPS6114649Y2 JP13157380U JP13157380U JPS6114649Y2 JP S6114649 Y2 JPS6114649 Y2 JP S6114649Y2 JP 13157380 U JP13157380 U JP 13157380U JP 13157380 U JP13157380 U JP 13157380U JP S6114649 Y2 JPS6114649 Y2 JP S6114649Y2
Authority
JP
Japan
Prior art keywords
space
membrane member
flexible membrane
force
spool valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13157380U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5754707U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13157380U priority Critical patent/JPS6114649Y2/ja
Publication of JPS5754707U publication Critical patent/JPS5754707U/ja
Application granted granted Critical
Publication of JPS6114649Y2 publication Critical patent/JPS6114649Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
JP13157380U 1980-09-16 1980-09-16 Expired JPS6114649Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13157380U JPS6114649Y2 (en]) 1980-09-16 1980-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13157380U JPS6114649Y2 (en]) 1980-09-16 1980-09-16

Publications (2)

Publication Number Publication Date
JPS5754707U JPS5754707U (en]) 1982-03-30
JPS6114649Y2 true JPS6114649Y2 (en]) 1986-05-08

Family

ID=29491852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13157380U Expired JPS6114649Y2 (en]) 1980-09-16 1980-09-16

Country Status (1)

Country Link
JP (1) JPS6114649Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01104258U (en]) * 1987-12-28 1989-07-13
JPH01171255U (en]) * 1988-05-24 1989-12-04

Also Published As

Publication number Publication date
JPS5754707U (en]) 1982-03-30

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